Device for preventing intensity reduction of optical signal, optical emission spectrometer, optical instrument, and mass spectrometer including the same

ABSTRACT

A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.

CROSS REFERENCE TO RELATED APPLICATION

This application is a division of U.S. patent application Ser. No.13/293,265, filed Nov. 10, 2011, the disclosure of which is incorporatedby reference in its entirety for all purposes.

BACKGROUND

1. Technical Field

The present invention relates to a device for preventing the intensityreduction of an optical signal, an optical emission spectrometer, anoptical instrument, and a mass spectrometer including the same.

2. Background Art

In general, in a processing of wafers and the like of semiconductorelements, a plasma process is widely used and particularly, in theprocessing of DRAM wafers and the like which are expansively used due touniversalization of PCs and the like, it is required that wafers havinga size of 30 cm are produced at a high yield by the plasma process.

For the processing uniformity of the wafers, it is required that anecessary etching process is exactly progressed by exactly and stablycontrolling a plasma source and it is more important to exactly controla plasma field generated from the plasma source according to therefinement of wafer patterns.

Accordingly, in order to measure the plasma process used in asemiconductor manufacturing process, various contact measuringtechniques such as various optical techniques such as a laserfluorescence spectrometric method, an emission spectrometric method, anabsorption spectrometric method, etc., an electric probe, a massspectrometer, an inductive coupled plasma (ICP), and the like.

However, when the plasma is measured by the optical techniques using theoptical emission spectrometer and the like, a measured intensity of theoptical signal is reduced due to contamination of a receiving opticalwindow and as a result, the receiving sensitivity of a measuringinstrument is lowered, such that it is impossible to measure the plasmain many cases.

Further, even in a device of analyzing components by absorbing gasessuch as the mass spectrometer, the ICP (inductively coupled plasma), andthe optical emission spectrometer, since reactive ions and particles areabsorbed to a detector in the absorbing process of the gas, theperformance of the detector is deteriorated.

Further, since RF electromagnetic waves, ultrahigh frequencies, and thelike are radiated in a plasma generation process or the generatedplasma, if the insides of the optical emission spectrometer and the massspectrometer are exposed by the harmful electromagnetic waves as it is,malfunction of communication equipment may occur, such that in order tosolve the problems due to the harmful electromagnetic waves, measuresare required.

SUMMARY OF THE DISCLOSURE

The present invention has been made in an effort to provide a device forpreventing the intensity reduction of an optical signal capable ofefficiently solving problems due to charging particles and harmfulelectromagnetic waves such as an RF electromagnetic wave which act ascontaminants deteriorating measuring sensitivity of an optical emissionspectrometer, an optical instrument, a mass spectrometer, and an opticalemission spectrometer, an optical instrument, and a mass spectrometerincluding the same.

An exemplary embodiment of the present invention provides a device forpreventing the intensity reduction of an optical signal including ashielding filter which has a mesh structure capable of blocking RFelectromagnetic waves radiated from a plasma field for a waferprocessing, is installed in the front of an optical window of an opticalemission spectrometer for measuring the plasma field from an emissionspectrum image of the plasma field, and collects charging particlespassing through the mesh.

One shielding filter may have an extension surface in a verticaldirection to input and inflow paths of a plasma emission spectrum.

A plurality of shielding filters having an extension surface in avertical direction to input and inflow paths of the plasma emissionspectrum may be continuously arranged according to the input and inflowpaths of the plasma emission spectrum.

The plurality of shielding filters may include hollow parts and crossingparts of the mesh having the same phase as each other.

The plurality of shielding filters may include hollow parts and crossingparts of the mesh having different phases from each other.

The plurality of shielding filters may have extension directions oflinear elements configuring the mesh which are disposed to be differentfrom each other.

The plurality of shielding filters may have a regular phase differenceaccording to the extension direction of the linear element configuringthe mesh.

The plurality of shielding filters may have mesh structures havingdifferent densities.

The device for preventing the intensity reduction of an optical signalmay further include a fixation frame which has a shape corresponding toa circumference of the shielding filter, is connected to the shieldingfilter, and assembled to the front end of the optical window of theoptical emission spectrometer.

Insertion grooves into which the shielding filter is inserted and fixedmay be formed at the inner portion of the fixation frame.

The fixation frame may be contact-connected to one-side circumference ofthe shielding filter to restrict the shielding filter or pressurizedtoward the front end of the optical emission spectrometer.

The device for preventing the intensity reduction of an optical signalmay further include an insertion ring inserted between the front end ofthe optical emission spectrometer and the shielding filter and/orbetween the shielding filters with a spaced interval.

The insertion ring may be made of an elastic member.

Another exemplary embodiment of the present invention provides anoptical emission spectrometer for measuring plasma including: ashielding filter which has a mesh structure capable of blocking RFelectromagnetic waves radiated from a plasma field for a waferprocessing, is installed in the front of an optical window into which anemission spectrum of the plasma field is inputted, and collects chargingparticles passing through the mesh; an optical system main bodyincluding a receiving lens receiving the plasma emission spectrumpassing through the shielding filter, an aperture determining a size ofthe optical signal inputted to and/or outputted from the receiving lens,and a pinhole limiting the depth of focus of the optical signal passingthrough the receiving lens; and an analyzer analyzing emission spectrumimage of the plasma field by receiving the optical signal passingthrough the aperture and the pinhole from the optical system main body.

The optical emission spectrometer for measuring plasma may furtherinclude a protection window made of a transparent material and disposedbetween the receiving lens and the shielding filter.

The optical emission spectrometer for measuring plasma may furtherinclude a laser device irradiate a laser in a proceeding direction andan opposed direction of the optical signal in the optical system mainbody so that the receiving lens, the aperture, and the pinhole arealigned and controlled therebetween by matching a collecting position ofthe laser light and a measuring position of the plasma field.

Another exemplary embodiment of the present invention provides anoptical instrument including: a shielding filter which has a meshstructure capable of blocking RF electromagnetic waves radiated from aplasma field for a wafer processing, is installed in the front of anoptical window into which an emission spectrum of the plasma field isinputted, and collects charging particles passing through the mesh; alens receiving a plasma emission spectrum passing through the shieldingfilter; and a light processing device making an image of an object ormeasuring physical parameters by reflecting, refracting, interfering,diffracting, and/or polarizing the optical signal passing through thelens.

Another exemplary embodiment of the present invention provides a massspectrometer including: a shielding filter which has a mesh structurecapable of blocking an RF electromagnetic wave radiated in a plasmafield for a wafer processing and is installed in the front of an inletof the analyzed gas to collecting the charging particles passing throughthe mesh; an ionizer ionizing and accelerating the analyzed gas; aseparator separating ions accelerated by passing, through the ionizeraccording to a mass; and a detector detecting and measuring theseparated ions through the separator.

Another exemplary embodiment of the present invention provides a devicefor preventing the intensity reduction of an optical signal including aplurality of positive electrode plates and negative electrode plateshaving concentric holes formed at the center thereof and alternatelyarranged so as to overlap with each other to collect charging particlespassing through the holes.

The positive electrode plate and the negative electrode plate may beinsulated from each other by a nonconductor and in order to prevent thepositive electrode plate and the negative electrode plate from beingcurrent-conducted with each other by the contamination of thenonconductor surface due to the charging particles, the nonconductor maybe configured by i) an insulation part inserted between the positiveelectrode plate and the negative electrode plate, ii) ananti-contamination part formed to be spaced apart from the positiveelectrode plate and the negative electrode plate with a regularinterval, and iii) a connection part connecting the insulation part andthe anti-contamination part.

The electrode plate array may be insulated from an external body by thenonconductor.

Another exemplary embodiment of the present invention provides anoptical emission spectrometer including: i) a device for preventing theintensity reduction of an optical signal including a plurality ofpositive electrode plates and negative electrode plates havingconcentric holes formed at the center thereof and alternately arrangedso as to overlap with each other to collect charging particles passingthrough the holes; ii) an optical system body including a receiving lensinto which the optical signal passing through the device for preventingthe intensity reduction of the optical signal flows, a pinhole on whichan image of the optical signal passing through the receiving lens isfocused, an aperture installed between the pinhole and the receivinglens to determine a receiving angle, and a transfer optical systemtransferring the optical signal passing through the pinhole; iii) anoptical fiber transferring the optical signal passing through theoptical system body to the analyzer; and iv) a spectrum analyzeranalyzing the optical signal collected through the optical fiber.

Sizes of inner concentric circles formed at the positive electrode plateand the negative electrode plate configuring the device for preventingthe intensity reduction of an optical signal may be determined accordinga receiving angle of the light, the positive electrode plate and thenegative electrode plate may be black-colored or black-processed with aconductive material in order to prevent the scattering of light, and aprotection window disposed in the front of the receiving lens isseparately formed at the device for preventing the intensity reductionof an optical signal in order to prevent the contamination of thereceiving lens.

The optical emission spectrometer may further include a laser deviceconnected to the optical fiber and the measuring position and the lensmay be aligned by matching a collected position of the laser lightemitted from the laser device and a position of a measuring target.

Another exemplary embodiment of the present invention provides a massspectrometer including: i) a device for preventing the intensityreduction of an optical signal of an analyzed sample including aplurality of positive electrode plates and negative electrode plateshaving concentric holes formed at the center thereof and alternatelyarranged so as to overlap with each other to collect charging particlespassing through the holes; ii) an ionizer ionizing and accelerating theanalyzed sample; iii) a separator separating accelerated ions accordingto a mass; and iv) a detector detecting and measuring the separatedions.

According to exemplary embodiments of the present invention, since ashielding filter having a mesh structure capable of collecting chargingparticles is installed in the front of an optical window of an opticalinstrument such as an optical emission spectrometer, a camera, and thelike into which an optical signal or analyzed gas is inputted and flowsor an inlet of a mass spectrometer, it is possible to prevent thedeterioration in a measurement due to contamination particles,generation of an analysis error, and performance.

Further, since the charging particles such as ions, ion adherentmatters, and the like additionally generated in a plasma process and thelike are collected and removed in the shielding filter, it is possibleto prevent the contamination of an optical window of the opticalinstrument due to attachment of the charging particles and prevent thecontamination of a measuring instrument by collecting the chargingparticles in gas flowing into an analyzer.

Further, the shielding filter having the mesh structure can befabricated and easily implemented by a simple assembling in which theshielding filter is installed in the front of various contact andcontactless measuring instruments and analyzers for measuring animmaterial thing such as an optical signal (light, heat, and the like)or analyzing a material thing (atoms, molecules, and the like)configuring the gas.

Further, if the shielding filter is made of a conductive material suchas a metallic material, a conductive polymer, and the like, theshielding filter may be configured by electrodes having predeterminedvoltage by connecting the shielding filter with an electrode terminal ofa power connection device. In addition, when the shielding filter isconfigured as an electrode structure, although a separate constituentelement such as the power connection device is not included, theshielding filter may be configured by a ground electrode bycurrent-conduction with the outside.

Further, when the shielding filter is made of the conductive materialsuch as a metallic material, a conductive polymer, and the like, an RFhigh-frequency electromagnetic wave contacted to the mesh in a processof passing through the shielding filter is absorbed into the shieldingfilter, such that an inflow thereof may also be blocked. Accordingly, itis possible to solve malfunction of electronic communication equipmentrelated to the optical instruments such as the optical emissionspectrometer and the mass spectrometer due to the harmfulelectromagnetic waves such as an RF electromagnetic wave, a superhighfrequency which are radiated from a plasma generating process or thegenerated plasma.

Further, since the optical signal or analyzed gas passes through theplurality of positive electrode plates and negative electrode plateswhich have concentric holes formed at the center thereof and arealternately arranged so as to overlap with each other, the chargingparticles generated in the plasma process and the like are collected,such that it is possible to prevent the intensity of the optical signalfrom being reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing a shielding filter of a device forpreventing the intensity reduction of an optical signal according to afirst exemplary embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a first example of a fixationframe for assembling the shielding filter of FIG. 1 to a front end of anoptical window of an optical instrument.

FIG. 3 is a cross-sectional view showing a second example of a fixationframe for assembling the shielding filter of FIG. 1 to a front end of anoptical window of an optical instrument.

FIG. 4 is a perspective view showing a shielding filter of a device forpreventing the intensity reduction of an optical signal according to asecond exemplary embodiment of the present invention.

FIG. 5 is a cross-sectional view showing a third example of a fixationframe for assembling the shielding filter of FIG. 4 to a front end of anoptical window of an optical instrument.

FIG. 6 is a cross-sectional view showing a fourth example of a fixationframe for assembling the shielding filter of FIG. 4 to a front end of anoptical window of an optical instrument.

FIG. 7 is a conceptual diagram showing a first example of an arrangementstructure of a shielding filter.

FIG. 8 is a conceptual diagram showing a second example of anarrangement structure of a shielding filter.

FIG. 9 is a conceptual diagram showing a third example of an arrangementstructure of a shielding filter.

FIG. 10 is a perspective view showing a shielding filter of a device forpreventing the intensity reduction of an optical signal according to athird exemplary embodiment of the present invention.

FIG. 11 is a cross-sectional view showing a fifth example of a fixationframe for assembling the shielding filter of FIG. 10 to a front end ofan optical window of an optical instrument.

FIG. 12 is a cross-sectional view showing a sixth example of a fixationframe for assembling the shielding filter of FIG. 10 to a front end ofan optical window of an optical instrument.

FIG. 13 is a cross-sectional view of an optical emission spectrometeraccording to the first exemplary embodiment of the present invention.

FIG. 14 is a cross-sectional view of a single-lens reflex according tothe first exemplary embodiment of the present invention.

FIG. 15 is a cross-sectional view of a-mass spectrometer according tothe first exemplary embodiment of the present invention.

FIG. 16 is a perspective view showing an electrode plate arrayconfiguring a device for preventing the intensity reduction of anoptical signal according to another exemplary embodiment of the presentinvention.

FIGS. 17 and 18 are cross-sectional views of a device for preventing theintensity reduction of an optical signal insulated with a nonconductoraccording to another exemplary embodiment of the present invention.

FIGS. 19 and 20 are cross-sectional views of an optical emissionspectrometer according to another exemplary embodiment of the presentinvention.

FIG. 21 is a cross-sectional view of a mass spectrometer according toanother exemplary embodiment of the present invention.

DETAILED DESCRIPTION

Hereinafter, exemplary embodiments of the present invention will bedescribed below with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a shielding filter of a device forpreventing the intensity reduction of an optical signal according to afirst exemplary embodiment of the present invention and FIGS. 2 and 3are cross-sectional views showing first and second examples of afixation frame together with a cross-section of line A-A of FIG. 1,respectively.

Referring to FIGS. 1 to 3, a device for prevention the intensityreduction of an optical signal according to an exemplary embodiment ofthe present invention includes a shielding filter 31 having a meshstructure capable of collecting charging particles floating on a path ofan emission spectrum (hereinafter, used together with an ‘opticalsignal’) of a plasma field while blocking a RF electromagnetic waveradiated in the plasma field.

The shielding filter 31 is installed in the front of optical windows ofa specific optical instrument such as an optical emission spectrometer10 a (see FIG. 13) into which the optical signal is inputted or ananalyzed gas flows and a general optical instrument such as a camera 40(see FIG. 14) or the mass spectrometer (see FIG. 15) so as to preventthe charging particles mixed in the optical signal or the analyzed gasfrom entering the optical windows of the optical emission spectrometer10 a and the optical instrument 10 b or the mass spectrometer 20 a.

Hereinafter, the specific optical instrument such as an optical emissionspectrometer 10 a (see FIG. 13) and the general optical instrument suchas a camera 40 (see FIG. 14) are called the optical instrument 10 b.

When the shielding filter 31 includes electrodes having an oppositepolarity to the charging particles, the charging particles mixed in theoptical signal or the analyzed gas are separated from the optical signalor the analyzed gas by an electrostatic force of the shielding filter 31to be attached and held to the shielding filter 31.

A constituent material thereof such as a metal material, polymer, andthe like is not particularly limited if the charging particles can beattached, but if the shielding filter 31 is made of a conductivematerial such as a metal material, a conductive polymer, and the like,the shielding filter 31 may be configured by an electrode havingpredetermined voltage by connecting the shielding filter 31 to anelectrode terminal of a power connecting device. In addition, althoughthe shielding filter 31 is configured as the electrode structure withouta separate constituent element such as the power connecting device, theshielding filter 31 may be configured as a ground electrode byconnecting with the outside.

Further, when the shielding filter 31 is made of the conductive materialsuch as a metal material, a conductive polymer, and the like, the RFhigh-frequency electromagnetic wave contacted to the mesh when passingthrough the shielding filter 31 is absorbed into the shielding filter 31such that an inflow thereof may also be blocked. Accordingly, it ispossible to solve malfunction of electronic communication equipmentrelated to the optical instruments such as the optical emissionspectrometer and the mass spectrometer due to the harmfulelectromagnetic waves such as an RF electromagnetic wave, a superhighfrequency which are radiated from, a plasma generating process or thegenerated plasma.

As described above, when the shielding filter 31 shields thehigh-frequency electromagnetic wave and simultaneously, implements acollecting function of the charging particles, neutral particles havinga larger size than a hollow of the mesh configuring the shielding filter31 other than the charging particle may be collected.

Referring to FIG. 1, in the first exemplary embodiment of the presentinvention, the shielding filter 31 has a net shape having a flatextension surface in a vertical direction to the input or inflow path ofthe optical signal or analyzed gas.

The net-shaped shielding filter 31 may be directly installed on thefront end of the optical window of the optical instrument 10 b or themass spectrometer 20 a, but as show in FIGS. 2 and 3, the shieldingfilter 31 may be more firmly and easily attached and assembled by usinga fixation frame 32.

One side of the fixation frame 32 has a shape corresponding to acircumference of the shielding filter 31, the other side thereof has ashape corresponding to the front end of the optical window of theoptical instrument 10 b or the mass spectrometer 20 a, and both one sideand the other side of the fixation frame 32 are assembled and installedso as to be contacted to the shielding filter 31 and the front end ofthe optical window of the optical instrument 10 b or the massspectrometer 20 a.

The first example of the fixation frame 32 shown in FIG. 2 has astructure with an insertion groove (not shown) which can be fixed byinserting the circumference of the shielding filter 31 on one side (aninner side in FIG. 2) of the fixation frame 32.

The second example of the fixation frame 32 shown in FIG. 3 has a flatring shape, one side (a left side of FIG. 3) of the fixation frame 32 iscontactually connected to one circumference of the shielding filter 31to put the shielding filter 31 between the front end of the opticalwindow of the optical instrument 10 b or the mass spectrometer 20 a orbe pressurized to the optical window of the optical instrument 10 b orthe mass spectrometer 20 a.

The front end of the optical instrument 10 b or the mass spectrometer 20a and the shielding filter 31 may be directly contacted to each other,but in order to prevent the damage due to the direct contact with theshielding filter 31 and control a installation distance, an insertionring 33 may be inserted between the optical instrument 10 b or the frontend of the mass spectrometer 20 a and the shielding filter 31.

When the insertion ring 33 is configured by an elastic member, aflowable separated distance is formed between the front end of theoptical instrument 10 b or the mass spectrometer 20 a and the shieldingfilter 31, such that a defective assembly due to an assembly error and amanufacturing error between the shielding filter 31 and the front end ofthe optical instrument 10 b or the mass spectrometer 20 a may becompensated and vibration, impact, and the like in the assembling andusing processes may be shock-absorbed and attenuated.

When the shielding filter 31 is configured by the electrode having thespecific voltage, the fixation frame 32 may be configured by anonconductor which can insulate the shielding filter 31 from theoutside. When the shielding filter 31 is configured by the groundelectrode, the fixation frame 32 may be connected with an externalground element device (e.g., a reactor of plasma and the like).

FIG. 4 is a perspective view showing a shielding filter of a device forpreventing the intensity reduction of an optical signal according to asecond exemplary embodiment of the present invention, FIGS. 5 and 6 arecross-sectional views of third and fourth examples of a fixation frametogether with a cross-section of line B-B of FIG. 4, respectively, andFIGS. 7 to 9 are conceptual diagrams showing first, second, and thirdexamples of an arrangement structure of a shielding filter,respectively.

Referring to FIGS. 4 to 6, a plurality of shielding filters 31 accordingto the second exemplary embodiment of the present invention which havean extension surface in a vertical direction to the input or inflow pathof the optical signal or analyzed gas are continuously disposedaccording to the input or inflow path of the optical signal or analyzedgas, as compared with the shielding filters 31 according to the firstexemplary embodiment shown in FIGS. 1 to 3.

Hereinafter, when the plurality of shielding filters 31 are provided,for convenience of the description, a shielding filter 31 a, a shieldingfilter 31 b, and a shielding filter 31 c are sequentially disposed fromthe shielding filters 31 disposed at the foremost end.

The plurality of shielding filters 31 a, 31 b, and 31 c may be installedat the front end of the optical window of the optical instrument 10 b orthe mass spectrometer 20 a while a plurality of insertion grooves (notshown) which are formed to be separated from each other at the innercircumference are assembled on the fixation frame 32, as shown in FIG.5.

Further, a front end circumference of the shielding filter 31 a which isdisposed at the foremost end of the plurality of shielding filters 31 a,31 b, and 31 c is contacted to the fixation frame 32 having the flatring shape, as shown in FIG. 6 and the insertion ring 33 may be insertedand contacted between the shielding filters 31 a, 31 b, and 31 c andbetween the optical instrument 10 b or the mass spectrometer 20 a andthe shielding filter 31.

When the plurality of shielding, filters 31 a, 31 b, and 31 c arecontinuously disposed, a plurality of hollow parts and crossing parts ofthe mesh may be disposed at the same phase as each other and theplurality of hollow parts and crossing parts of the mesh may be disposedat different phases from each other.

When the plurality of shielding filters 31 a, 31 b, and 31 c aredisposed, although the RF electromagnetic waves or the chargingparticles are not contacted with or collected in the shielding filter 31a disposed at the foremost end, the electromagnetic waves or thecharging particles may be contacted with or collected in the shieldingfilters 31 b and 31 c when sequentially passing through the shieldingfilters 31 b and 31 c in multi-stepwise.

As shown in FIGS. 7 to 9, when the plurality of shielding filters 31 a,31 b, and 31 c including the hollow parts and the crossing parts of themesh having different phases are disposed, although the chargingparticles move to a linear path without a phase change in a horizontaldirection, any one of the plurality of shielding filters 31 a, 31 b, and31 c may be collected when passing through the plurality of shieldingfilters 31 a, 31 b, and 31 c.

As shown in FIGS. 7A to 7C, each of the shielding filters 31 a, 31 b,and 31 c may be disposed so as to have different extension directions oflinear elements configuring the mesh (0°, 30°, or 60° in FIG. 7) and theplurality of shielding filters having the same mesh structure may bedisposed at different angles.

Further, as shown in FIGS. 8A to 8C, the shielding filters 31 a, 31 b,and 31 c may be disposed so as to have a phase between the extensiondirections (vertical directions or horizontal directions) of the linearelements configuring the mesh (in FIG. 8, distance x1 between upper endof shielding filter 31 a and the first column<distance x2 between upperend of shielding filter 31 b and the first column<distance x3 betweenupper end of shielding filter 31 c and the first column<mesh distancex0).

Further, as shown in FIGS. 9A to 9C, the plurality of shielding filters31 a, 31 b, and 31 c may have mesh structures having differentdensities, and the charging particles larger than the mesh distance ofthe shielding filter 31 a are collected in the shielding filter 31 a andthe charging particles smaller than the mesh distance may be separatelycollected in the shielding filter 31 b or shielding filter 31 caccording to the size thereof (in FIG. 9, mesh distance x01 of shieldingfilter 31 a<mesh distance x02 of shielding filter 31 b<mesh distance x03of shielding filter 31 c).

FIG. 10 is a perspective view showing a shielding filter configured by amesh having a curvature of a device for preventing the intensityreduction of an optical signal according to a third exemplary embodimentof the present invention and FIGS. 11 and 12 are cross-sectional viewsshowing fifth and sixth examples of a fixation frame together with across-section of line C-C of FIG. 10, respectively.

The shielding filter 31 may have a 3-dimentional stereoscopic shape, nota 2-dimentional planar shape and referring to FIGS. 10 to 12, theshielding filter 31 according to the third exemplary embodiment of thepresent invention has a convex dome shape which can easily check acollecting degree of the charging particles from the outside and easilydeviate and remove the charging particles from the shielding filter 31due to the force of gravity.

The shielding filter 31 may be installed at the front end of the opticalwindow of the optical instrument 10 b or the mass spectrometer 20 awhile a plurality of circular insertion grooves (not shown) which arecontinuously formed at the front end circumference are assembled on thefixation frame 32, as shown in FIG. 11.

Further, as shown in FIG. 12, circumferences of the outer and inner sideends of the shielding filter 31 are contacted to an inner part of thefixation frame 32 having a curved surface corresponding to an outersurface of a rear end of the shielding filter 31 a and an outer part ofthe insertion ring 33 inserted between the optical instrument 10 b orthe mass spectrometer 20 a and the shielding filter 31.

FIG. 13 is a cross-sectional view of an optical emission spectrometeraccording to the first exemplary embodiment of the present invention.

Referring to FIG. 13, the optical emission spectrometer 10 a accordingto the first exemplary embodiment of the present invention includes theshielding filter 31, an optical system main body (not shown) configuredby a receiving lens 10, a pinhole 12, an aperture 11, and a transferoptical system 13 in order to analyze an emission spectrum of a plasmafield for a wafer processing, and an analyzer 16.

The charging particles dispersing and flowing on the optical signal pathand the RF high-frequency electromagnetic wave proceeding toward thereceiving lens 10 are collected and blocked by the shielding filter 31disposed in the front of the optical window (the receiving lens 10 inFIG. 13) and the optical signal passes through the shielding filter 31to be inputted to the receiving lens 10.

The aperture 11 is disposed in the front and/or rear of the receivinglens 10 to determine a magnitude (or a receiving angle α) of a plasmaemission spectrum (optical signal) inputted to and/or outputted from thereceiving lens 10. If the aperture 11 is disposed in the front of thereceiving lens 10, an out-focused portion of the optical signal inputtedto the receiving lens 10 is blocked and if the aperture 11 is disposedin the front of the receiving lens 10 an in-focused portion of theoptical signal outputted from the receiving lens 10 is blocked.

The pinhole 12 is disposed at a point where the image of the opticalsignal passing through the receiving lens 10 is focused to limit thedepth of focus of the optical signal passing through the receiving lens10 and improve the resolution and the transfer optical system 13transfers the optical signal passing through the receiving lens 10, theaperture 11, and the pinhole 12 to the outside.

The optical signal delivered to the transfer optical system 13 istransferred to the analyzer 16 by an optical fiber 15 and the like andthe analyzer 16 analyzes the emission spectrum (optical signal) of theplasma field transferred through the optical fiber 15.

While a measuring distance of the plasma field is changed by controllinga position of the receiving lens 10 having the above structure, thefront and rear apertures 11, and the pinhole 12, the intensitydistribution of light having the spatial resolution may be measured.

If the surface of the shielding filter 31 is colored with black orprocessed with a black pigment, in which an anti-scattering function oflight is implemented, the distortion of the optical signal due to theshielding filter 31 may be prevented.

When a protection window 36 made of a transparent material is installedbetween the receiving lens 10 and the shielding filter 31, contaminationparticles collected in the shielding filter 31 is removed by theprotection window 36 or the contamination particles of the shieldingfilter 31 moves toward the receiving lens 10 in a process of replacingthe shielding filter 31, such that it is possible to prevent thecontamination. When the fixation frame 32 is included, the protectionwindow 36 may be integrally assembled with the shielding filter 31 bythe exemplary embodiment in which the insertion groove is inserted intothe fixation frame 32.

Meanwhile, when the shielding filter 31 is attached to the front of theoptical system main body, by an optical effect due to the shieldingfilter 31 or a viewing angle limit of the optical emission spectrometer10 a due to the fixation frame 32, the insertion ring 33, and the like,it is difficult to arrange inner devices such as the receiving lens 10and the aperture 11 based on the plasma measuring point. The problem maybe solved by connecting, a laser device (replaced with the analyzer 16or included in the analyzer 16 in FIG. 13) from which laser light isinputted to the optical fiber 15.

The laser device irradiates the laser in a proceeding direction and anopposed direction of the optical signal in the optical system main body,such that a measuring position and the inner devices including thereceiving lens 10 and aperture 11 may be arranged and controlled bymatching a collecting position of the laser light and the plasmameasuring position.

If the laser light emitted from the laser device is inputted into theoptical system main body through the optical fiber 15 and a fiberconnector 14 which connects the optical fiber 15 on the light path ofthe optical system main body, the laser light is irradiated in the frontof the optical system main body to be collected on an object of thefront thereof, such that inner constituent elements of the opticalsystem main body may be arranged by matching the collecting position ofthe laser light emitted through the optical system main body and theplasma measuring point.

FIG. 14 is a cross-sectional view of a single-lens reflex according tothe first exemplary embodiment of the present invention.

Hereinafter, the specific optical instrument such as an optical emissionspectrometer 10 a (see FIG. 13) and the general optical instrument suchas a camera 40 (see FIG. 14) are called the optical instrument 10 b andan exemplary embodiment in which the shielding filter 31 is applied to asingle-lens reflex representing a camera shown in FIG. 14 will bedescribed.

The single-lens reflex (SLR) is called a camera which projects an imageon a mate focus screen by using a mirror installed between the lens anda film and most single-lens reflexes are installed with a roofpentaprism or a pentamirror for refracting the light on the upperportion to focus the image passing through the lens on a view finder. Inaddition, a waist-level finder or a porro prism is used.

Referring to FIG. 14, the camera 40 according to the first exemplaryembodiment of the present invention includes the shielding filter 31, alens part 41, a mirror 42, a shutter 43, a sensor or film 44, a focusscreen 45, a compression lens 46, a pentaprism 47, and an eyepiece 48.

The charging particles dispersing and flowing on a path of imageinformation (optical signal) inputted to the lens part 41 of the camerahave a mesh structure collecting the charging particles and is collectedby the shielding filter 31 installed in the front of the optical window(the lens part 41 in FIG. 14), such that the image information (opticalsignal) is inputted to the lens part 41 by passing through the shieldingfilter 31.

In non-photographing, the image information (optical signal) inputtedthrough the lens part 41 is reflected in the mirror 42 to be focused andprojected on the focus screen 45 and the image information passingthrough the compression lens 46 is reflected in the inside of thepentaprism 47 to be delivered to the eyepiece 48.

In photographing, the mirror 42 goes up in an arrow direction and theshutter (focal plane shutter) 43 opens to be projected on the sensor orfilm 44. There is no viewing difference between the image focused on thefocus screen 45 and the image focused on the sensor or film 44.

Referring to FIGS. 14 and 15, the optical instrument 10 b according tothe exemplary embodiment of the present invention may include theshielding filter 31 installed in the front of the optical window intowhich the optical signal is inputted, a lens in which the optical signalpassing through the shielding filter 31 is inputted, a light processingdevice making an image of an object or measuring physical parameters byreflecting, refracting, interfering, diffracting, and/or polarizing theoptical signal inputted through the lens.

FIG. 15 is a cross-sectional view of a mass spectrometer according tothe first exemplary embodiment of the present invention.

Referring to FIG. 15, a mass spectrometer 20 a according to the firstexemplary embodiment of the present invention includes the shieldingfilter 31, an ionizer 20, a separator 21, and a detector 22.

The shielding filter 31 has a mesh structure which can block an RFelectromagnetic wave radiated in a plasma field for a wafer processinglike the case where the shielding filter 31 is applied to the opticalinstrument 10 b and is installed in the front of an inlet of theanalyzed gas to collecting the charging particles passing through themesh.

The charging particles dispersing and flowing on an inflow path of theanalyzed gas and the RF high-frequency electromagnetic wave radiatedduring the plasma process are collected and blocked by the shieldingfilter 31 installed in the front of the inlet of the ionizer 20 intowhich the analyzed gas flows.

The analyzed gas in which the charging particles are removed by passingthrough the shielding filter 31 flows into the inlet of the ionizer 20to be ionized and accelerate, the separator 21 separates the ionsaccelerating by passing through the ionizer 20 according to a mass, andthe detector 22 detects and measures the ions separated through theseparator 21.

As shown in FIG. 16, a device for preventing the intensity reduction ofan optical signal according to another exemplary embodiment of thepresent invention is configured by a plurality of positive electrodeplates 3 and negative electrode plates 4 which have concentric holesformed at the center thereof and are alternately arranged so as tooverlap with each other and the alternately arranged electrode platescollect the charging particles passing through the concentric holes.

Voltage applied to the electrode plate is determined by considering akind of the charging particles and peripheral voltage and may be severalvolts to several tens volts in a general semiconductor plasma process.When considering in that a pressure of the general plasma process isseveral mTorr to several tens mTorr, the effect that tens of thousandstimes voltage is applied in an air pressure may be achieved.

The positive electrode plate 3 and the negative electrode plate 4 may beinsulated from each other by the nonconductor 2, the electrode platearray may be insulated from each other by using an external metallicmain body 1 and an insulator 5, and the external main body may begrounded to be connected with a reactor of the plasma and the like.

FIGS. 17 and 18 show a structure of the device for preventing theintensity reduction of the optical signal insulated between the positiveelectrode plate 3 and the negative electrode plate 4 by the nonconductor2 and the insulator may be interposed between the positive electrodeplates and the negative electrode plates which are alternately arranged.

In this case, since the collected charging particles are piled up on thesurface of the nonconductor such that the insulation between theelectrodes may be broken, the nonconductor may be formed in variousstructures for preventing this and preferably, as shown in FIGS. 17 and18, the structure of the nonconductor may be configured by an insulationpart 50 inserted between the positive electrode plate and the negativeelectrode plate, an anti-contamination part 52 formed to be spaced apartfrom the positive electrode plate and the negative electrode plate witha constant interval, and a connection part 51 connecting the insulationpart 50 and the anti-contamination part 52.

The device for preventing the intensity reduction of the optical signaldescribed above may be used for various optical techniques or contactmeasuring techniques which measure the optical signal or analyzed gas.

FIGS. 19 and 20 show cross-sectional views of the optical emissionspectrometer to which the device for preventing the intensity reductionof the optical signal is applied. The optical emission spectrometer isconfigured by a plurality of positive electrode plates 3 and negativeelectrode plates 4 which have concentric holes formed at the center andare alternately arranged so as to overlap with each other. In addition,the optical emission spectrometer includes the device for preventing theintensity reduction of the optical signal which collects the chargingparticles passing through the holes, an optical system body including areceiving lens 10 into which the optical signal passing through thedevice for preventing the intensity reduction of the optical signalflows, a pinhole 12 on which an image of the optical signal passingthrough the receiving lens is focused, an aperture 11 installed betweenthe pinhole and the receiving lens to determine a receiving angle, and atransfer optical system 13 transferring the optical signal passingthrough the pinhole, an optical fiber 15 transferring the optical signalpassing through the optical system body to the analyzer, and a spectrumanalyzer 16 analyzing the optical signal collected through the opticalfiber.

In this case, the device for preventing the intensity reduction of theoptical signal is attached and used to the front of the optical emissionspectrometer for collecting the light generated from a measured target 7of plasma and the like. The light radiated from the observed target suchas plasma and the like focuses the image on the pinhole 12 by thereceiving lens 10 of the optical emission spectrometer via the devicefor preventing the intensity reduction of the optical signal and thelight passing through the pinhole is inputted into the optical fiberconnection device 14 through the transfer optical system 13 to passthrough the optical fiber 15 and finally, be inputted to the spectrumanalyzer 16.

Sizes of inner concentric circles formed at the positive electrodeplates and the negative electrode plates configuring the device forpreventing the intensity reduction of the optical signal may bevariously controlled according to a receiving angle of the light.Accordingly, it is possible to prevent the optical signal emitted from aportion other than the measuring portion from being inputted to thespectrometer and improve the signal-to-noise ratio when a predeterminedportion is limited and a measurement having spatial resolution isperformed.

In this case, each of the electrode plates configuring the device forpreventing the intensity reduction of the optical signal may befabricated by being black-colored or black-processed with a conductivematerial in order to prevent the scattering of light. In addition, whena lot of contamination particles are piled up in the anti-contaminationdevice such that the replacement thereof is required, the whole devicefor preventing the intensity reduction of the optical signal isexchanged by forming separately a protection window in the front of thereceiving lens, such that the contamination of the receiving part of theoptical emission spectrometer may be prevented.

Meanwhile, when the device for preventing the intensity reduction of theoptical signal is attached to the front of the optical emissionspectrometer, since a viewing angle of the optical emission spectrometeris limited, it is difficult to align the device. Accordingly, in orderto solve the problem, the laser device from which the laser light isoutputted may be connected to the optical fiber.

If the laser light from the laser device is inputted through the fiberand the fiber connector, the laser light is emitted to the front of theoptical emission spectrometer to be collected at one point of a positionmeasuring the plasma. In this case, the optical emission spectrometermay be aligned by matching a collected position of the laser lightemitted through the optical emission spectrometer and a position of ameasuring target.

FIG. 21 shows a cross-sectional view of a mass spectrometer to which thedevice for preventing the intensity reduction of the optical signal isapplied. The mass spectrometer is configured by a plurality of positiveelectrode plates and negative electrode plates which have concentricholes formed at the center thereof and are alternately arranged so as tooverlap with each other. In addition, the mass spectrometer includes adevice for preventing the intensity reduction of an optical signal of ananalyzing sample collecting the charging particles passing through theholes, an ionizer ionizing and accelerating the analyzing sample, aseparator separating the accelerating ions according to a mass, and adetector detecting and measuring the separated ions. Theanti-contamination device is attached and used to the front of the massspectrometer into which the analyzed gas flows.

If the charging particles generated from the processing plasma areabsorbed to the detector in a process of absorbing the analyzed gaswhich is a mass spectrometric target, performance of the detector may bedeteriorated. Accordingly, like the optical emission spectrometer, theanalyzed gas passes through the concentric holes of the electrode platesto collect the charging particles in the analyzed gas, such that it ispossible to prevent the contamination of the gas analyzer.

Further, when the gas is collected in the plasma process to analyze theprocess, the device for preventing the intensity reduction of theoptical signal removes the ion molecules included in the gas andabsorbed to the device, such that it is possible to improve thereliability of the measurement and prevent the contamination of thedevice.

The invention has been described in detail with reference to preferredembodiments thereof. However, it will be appreciated by those skilled inthe art that changes may be made in these embodiments without departingfrom the principles and spirit of the invention, the scope of which isdefined in the appended claims and their equivalents.

What is claimed is:
 1. A mass spectrometer comprising: a shieldingfilter which has a mesh structure capable of blocking an RFelectromagnetic wave radiated in a plasma field for a wafer processingand is installed in the front of an inlet of the analyzed gas tocollecting the charging particles passing through the mesh; an ionizerionizing and accelerating the analyzed gas; a separator separating ionsaccelerated by passing through the ionizer according to a mass; and adetector detecting and measuring the separated ions through theseparator.
 2. A device for preventing the intensity reduction of anoptical signal, comprising: a plurality of positive electrode plates andnegative electrode plates having concentric holes formed at the centerthereof and alternately arranged so as to overlap with each other tocollect charging particles passing through the holes.
 3. The device forpreventing the intensity reduction of an optical signal of claim 2,wherein the positive electrode plate and the negative electrode plateare insulated from each other by a nonconductor.
 4. The device forpreventing the intensity reduction of an optical signal of claim 3,wherein the nonconductor is configured by i) an insulation part insertedbetween the positive electrode plate and the negative electrode plate,ii) an anti-contamination part formed to be spaced apart from thepositive electrode plate and the negative electrode plate with a regularinterval, and iii) a connection part connecting the insulation part andthe anti-contamination part, in order to prevent the positive electrodeplate and the negative electrode plate from being current-conducted witheach other by the contamination of the nonconductor surface due to thecharging particles.
 5. The device for preventing the intensity reductionof an optical signal of claim wherein the electrode plate array isinsulated from, an external body by the nonconductor.
 6. An opticalemission spectrometer comprising: i) a device for preventing theintensity reduction of an optical signal including a plurality ofpositive electrode plates and negative electrode plates havingconcentric holes formed at the center thereof and alternately arrangedso as to overlap with each other to collect charging particles passingthrough the holes; ii) an optical system body including a receiving lensinto which the optical signal passing through the device for preventingthe intensity reduction of the optical signal flows, a pinhole on whichan image of the optical signal passing through the receiving lens isfocused, an aperture installed between the pinhole and the receivinglens to determine a receiving angle, and a transfer optical systemtransferring the optical signal passing through the pinhole; iii) anoptical fiber transferring the optical signal passing through theoptical system body to the analyzer; and iv) a spectrum analyzeranalyzing the optical signal collected through the optical fiber.
 7. Theoptical emission spectrometer of claim 6, wherein the positive electrodeplate and the negative electrode plate are insulated from each other bya nonconductor.
 8. The optical emission spectrometer of claim 7, whereinthe nonconductor is configured by i) an insulation part inserted betweenthe positive electrode plate and the negative electrode plate, ii) ananti-contamination part formed to be spaced apart from the positiveelectrode plate and the negative electrode plate with a regularinterval, and iii) a connection part connecting the insulation part andthe anti-contamination part, in order to prevent the positive electrodeplate and the negative electrode plate from being current-conducted witheach other by the contamination of the nonconductor surface due to thecharging particles.
 9. The optical emission spectrometer of claim 6,wherein the electrode plate array is insulated from an external body bythe nonconductor.
 10. The optical emission spectrometer of claim 6,wherein sizes of inner concentric circles formed at the positiveelectrode plate and the negative electrode plate configuring the devicefor preventing the intensity reduction of an optical signal aredetermined according a receiving angle of the light.
 11. The opticalemission spectrometer of claim 6, wherein the positive electrode plateand the negative electrode plate are black-colored or black-processedwith a conductive material, in order, to prevent the scattering oflight.
 12. The optical emission spectrometer of claim 6, wherein aprotection window disposed in the front of the receiving lens isseparately formed at the device for preventing the intensity reductionof an optical signal, in order to prevent the contamination of thereceiving lens.
 13. The optical emission spectrometer of claim 6,further comprising: a laser device connected to the optical fiber. 14.The optical emission spectrometer of claim 13, wherein the measuringposition and the lens are aligned by matching a collected position ofthe laser light emitted from the laser device and a position of ameasuring target.
 15. A mass spectrometer comprising: i) a device forpreventing the intensity reduction of an optical signal of an analyzedsample including, a plurality of positive electrode plates and negativeelectrode plates having concentric holes formed at the center thereofand alternately arranged so as to overlap with each other to collectcharging particles passing through the holes; ii) an ionizer ionizingand accelerating the analyzed sample; iii) a separator separatingaccelerated ions according to a mass; and iv) a detector detecting andmeasuring the separated ions.
 16. The mass spectrometer of claim 15,wherein the positive electrode plate and the negative electrode plateare insulated from each other by a nonconductor.
 17. The massspectrometer of claim 16, wherein the nonconductor is configured by i)an insulation part inserted between the positive electrode plate and thenegative electrode plate, ii) an anti-contamination part formed to bespaced apart from the positive electrode plate and the negativeelectrode plate with a regular interval, and iii) a connection partconnecting the insulation part and the anti-contamination part, in orderto prevent the positive electrode plate and the negative electrode platefrom being current-conducted with each other by the contamination of thenonconductor surface due to the charging particles.
 18. The massspectrometer of claim 15, wherein the electrode plate array is insulatedfrom an external body by the nonconductor.